Semiconductor TGV process chemistry
TGV uses laser modification plus wet etch, demanding high selectivity, undercut control and glass-substrate safety; post-etch cleaning must remove residue particles and ionic metals for subsequent metallization.
Supply high-selectivity TGV glass etchants, post-etch cleaners and developing chemistries across laser-modified wet hole-forming, cleaning and patterning.
Selectivity and undercut control protect via quality, balancing etch rate with glass-substrate safety, with process calibration and localization support.
